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Previously in situ feedback on electron beam drift based on imaging a mark or a grid pre-patterned on the substrate was reported [1 3], but no in situ feedback on electron beam spot size has been demonstrated.
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Figure 5 illustrates the similar-case-based beam arrangements based on a linear registration technique (a) and the optimized similar-case-based beam arrangement after the local optimization of each beam direction (b).
The piezoelectric beam element is based on Timoshenko beam theory.
The beam geometry was based on the beam test recommendation established by RILEM (1994).
We evaluated our method by comparing the method without and with an optimization step of beam arrangements and also by comparing the most usable beam arrangements based on the proposed method with original beam arrangements based on a manual method.
Figure 2 illustrates the determination of initial beam arrangements based on the linear registration technique.
3D-CRT will be delivered with 4 or more fields isocentric beam setup based on CT.
Herein, a two-dimensional co-rotational beam element, based on the Euler Bernoulli assumptions, is developed.
Turpin, A. et al. Optical vault: A reconfigurable bottle beam based on conical refraction of light.
We also investigate the maximum likelihood estimation for the drift coefficients based on continuous time observations.
Correction for instrument drift was based on the measurements of the NBS 127 standard.
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