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In this fabrication process, the 10-μm-sized microchannel can be fabricated by using laser lithography (step 1 in Fig. 5).
A good symmetric GRIN rod can be fabricated by using the swollen-gel polymerization.
Based on these results, a multi-frequency quantum well chip with emission from 2 to 9 THz may be fabricated by using the technique of selective intermixing.
The sensor components can be fabricated by using planar processes on a silicon substrate, making its manufacturing compatible to planar electronic fabrication technology.
Ideally, the communication speed of ~10 Gbps is possible taking into account the ~100-ps rise time of the graphene emitters in Fig. 2. As mentioned above, the high-speed blackbody emitters can be fabricated by using CVD-grown graphene as well as exfoliated graphene.
These kinds of microstructures can be fabricated by using the photolithography and wet-etching method step by step, but involves time-consuming design and fabrication process, as well as complicated alignment of different masters.
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The micro three-dimensional (3D) electrodes with separator are fabricated by using micro electro mechanical systems (MEMS) fabrication technology.
MEMS are fabricated by using the processing tools and materials employed in integrated-circuit (IC) manufacturing.
It was fabricated by using an NEC standard Nb process.
Two modules were fabricated by using p+nn+ bifacial cells and they were electrically characterized.
The designed cartridge is fabricated by using micromachining techniques including silicon etching and glass bonding.
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