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Here we present a novel batch fabrication platform which can be used to facilitate the batch fabrication of thin film devices on substrates with arbitrary shapes and sizes.
The proposed batch fabrication process is low cost and low time consuming.
This paper presents a technique for batch fabrication of electrical feedthroughs in CMOS wafers.
The traps can be individually electrically switched, are easily arrayable, and are amenable to batch fabrication.
We present the design, batch fabrication sequences and mechanical characterization of an optical near-field probe.
The adopted process is compatible with conventional batch fabrication steps and hence can be used for mass production.
Similar(20)
The combination of the two batch-fabrication processes, i.e. photochemical etching and screen printing, provides the opportunity for mass production of the device at low cost.
A novel tuneable filter has been designed for terahertz frequencies, and a self-releasing batch-fabrication process developed for implementing these devices.
Recently, a kind of microlens based on nanoholes capable of focusing all wavelengths in the visible spectrum to a single spot was reported by employing a batch-fabrication method of soft interference lithography (SIL) followed by a nanopatterning procedure [18].
A novel low-cost, batch-fabrication method combining the spin-coating nanosphere lithography (NSL) with the conventional photolithographic technique is demonstrated to efficiently produce the metallic planar microlenses and their arrays.
The translation of LSPR technologies depends on their compatibility with batch-fabrication to enable inexpensive devices.
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