Sentence examples for based on surface micromachining from inspiring English sources

The fabricated inertial microswitch based on surface micromachining technology was characterized by the dropping hammer system.

A nickel MEMS inertia switch with horizontal single sensitive direction has been designed and fabricated on quartz substrate based on surface micromachining technology.

Based on surface micromachining technology, a micro-electro-mechanical system (MEMS) inertia switch with single sensitive direction and reverse impact protection has been designed and fabricated on quartz substrate.

The fabrication process is based on surface micromachining techniques and is compatible with standard CMOS process, due to the materials used and the low-temperature deposition steps (PECVD silicon nitride for structural layer, evaporated chromium as sacrificial layer and sputtered aluminum for metallization).

Our improved micro-scale thermoelectric generator (μ-TEG) is based on polysilicon surface micromachining and is designed to convert waste heat into electrical power.

It is based on a surface micromachined poly-SiGe thermopile.

The switch is fabricated based on non-silicon surface micromachining technology.

The switch has a 6-layer structure, which is manufactured based on non-silicon surface micromachining technology.

This paper reports the design, fabrication and characterization of a bistable electromagnetic microrelay based on non-silicon surface micromachining technology.

Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated in regular silicon wafers as well as in SOI wafers by using the mixed micromachining based on the surface and bulk silicon microelectronics.

surface waves based on distributed surface sources assumption.