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In this article, we tried to realize the Mach-Zehnder interferometer sensor based on silicon oxides, and the refractive index of the oxides was controlled by the oxygen concentration to achieve the single-mode behavior of a total internal reflection (TIR) waveguide.
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More important, the advance is based on silicon oxide, one of the basic building blocks of today's chip industry, thus easing a move toward commercialization.
Several authors have reported intense luminescence in blue-green region, which is very rare in silicon oxide-based materials [12, 13] and therefore provides the possibility for fabricating full-color devices based on silicon technology.
Nucleophiles based on silicon, main group 5 or main group 6 elements were also employed.
Therefore, the protectivity of various types of compatible passivation layers (organic polyimide and photoresist films, inorganic mono, duplex and triplex layers based on PECVD silicon oxide and silicon nitride) was investigated and improved on microelectrode arrays exposed to 1 M NaCl (pH 2 to 10) at 25°C.
Most of the reported silicon-based photonic slabs are based on silicon-on-insulator platform [4 6].
Abraham, A., Olivier, S., Marris-Morini, D. & Vivien, L. Evaluation of the performances of a silicon optical modulator based on a silicon-oxide-silicon capacitor.
A biosensor experimental set-up based on a silicon oxide/ silicon nitride/ silicon oxide waveguide operating as polarization interferometer was designed, built, and tested.
Removing PR coated on silicon oxide layer was easier than that on Al Cu alloy one.
The vertically aligned CNT arrays grown on silicon oxide and Fe-deposited silicon had similar morphologies.
The layer shear modulus trend from highest to lowest is: lysozyme on 'Methyl' substrate >lysozyme on 'Silicon oxide' substrate >α-Syn/BSA on 'Methyl'/'Silicon oxide' substrates.
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