Exact(4)
It is demonstrated that these traps are most probably induced by the extrinsic base implantation.
Misalignment tolerances of the extrinsic base implantation mask show no great impact on transistor's AC performance.
The influence of transient enhanced boron out-diffusion from the intrinsic base, caused by excess silicon interstitials created during the extrinsic base implantation, has been investigated for a non-selective SiGe HBT process.
They have been found to be the polysilicon over-etch into the underlying silicon, the pedestal oxidation, both of them in the area of the extrinsic base implantation, and the extrinsic base lateral diffusion.
Similar(56)
The system employs pulsed-gas introduction, pulsed-plasma generation and plasma base ion implantation (PBII).
Choung and Tan (2008) have reported a case with pain and swelling in the region of the thumb base after implantation of an Artelon CMC spacer.
An overview of the rapidly developing field of modification of engineering polymers by plasma based ion implantation (PBII) and plasma based ion implantation and deposition (PBII&D) is presented.
A matched cohort design was used in which 50 ceramic head-stem pairs were matched with 50 CoCr head-stem pairs based on implantation time, lateral offset, stem design, and flexural rigidity.
Ti6Al4V and Ti were implanted by oxygen plasma based ion implantation at the pulsed negative voltages of 30 and 50 kV with a constant fluency of 4 × 1017 O/cm2.
Ti6Al4V was implanted by oxygen plasma based ion implantation at pulsed negative voltages of 50 kV with a fluence of 4 × 1017 O/cm2.
The thickness of layers produced by plasma based ion implantation (PBII) range from nano to micrometers.
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