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(b) The seed layer is deposited on the backside of the substrate.
The silicon substrate is etched 450 μm by a DRIE process from the backside of the substrate (Figure 6(i)).
The backside of the substrate was grounded through the probe-station chuck to prevent biasing of the channel through it.
This structure is achieved by alkaline etching (highly concentrated KOH solution at 80 °C) of the backside of the substrate through an oxide mask.
The transistor measurements were done between the two inner electrodes, and the gate voltage was applied from the backside of the substrate.
However, additional electrodes also screen all the electric field of the upper part of the substrate and we cannot observe induced signals from the backside of the substrate.
Similar(46)
Next, an Al top gate (with an area of 75 μm × 75 μm) and substrate electrodes are fabricated over the Ge QD array and the backside of the Si substrate, respectively.
Gold contacts were deposited with an area of 4.5 × 10-4 cm2, aluminuminum was deposited onto the backside of the silicon substrate.
Aluminium 99.99% was evaporated as a backside contact of the Si wafer to improve the distribution of the current density in the anodization stage and to achieve an ohmic contact on the backside of the silicon substrate.
The laser with a beam size of 0.3 mm × 0.3 mm was incident from the polished backside of the sapphire substrate onto the sapphire-GaN interface to decompose GaN into Ga and N.
The cells were completed by depositing electrodes that comprised a layer of Ag grid on the PEDOT PSS layer and Ti/Pd/Ag on the backside of the Si substrate using e-beam evaporation.
More suggestions(15)
bottom of the substrate
backside of the person
backside of the torso
backside of the strip
backside of the tab
backside of the crowd
backside of the canvas
backside of the bed
backside of the fabric
backside of the mask
backside of the pyramid
backside of the iPad
backside of the device
backside of the sample
backside of the piece
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