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The phrase "atoms of which" is correct and usable in written English.
It can be used when referring to specific atoms in relation to a larger context or subject previously mentioned.
Example: "The molecules are composed of various elements, atoms of which play a crucial role in chemical reactions."
Alternatives: "atoms that" or "atoms belonging to".
Exact(23)
The interfacial layer contained a few atomic percent of Ge, the atoms of which had been diffused from crystalline SiGe nanolaminates.
The realization that such is the case leads to another definition of an element, namely, a substance, all atoms of which have the same atomic number.
A lot of the atoms of which the earth is made were themselves made in supernovae.
Microcline forms a series of mixtures with the plagioclase albite, the sodium atoms of which replace the potassium atoms in the microcline structure.
Molecules, such as the isomers of glyceraldehyde the atoms of which can have different structural arrangements are known as asymmetrical molecules.
Rather, good activity was associated with appropriately placed electron donor atoms, of which the meta-disubstituted dimethoxy motif on either ring A or B was of particular relevance.
Similar(37)
f) MACCS 150: Any four atoms connected of which atom 1,2 and 3,4 connected by non-ring bond and atom 2,3 joined by ring bond.
The unit cell is composed of seven atoms, three of which are boron atoms, three are nitrogen atoms, and one is a carbon atom.
Addition of an element such as arsenic, an atom of which can also be substituted for a silicon atom in the crystal but which provides an extra valence electron (arsenic is a donor atom), releases its electron within the lattice.
Addition of an element such as boron, an atom of which can be substituted for a silicon atom in the crystal structure but which provides one less valence electron (boron is an acceptor atom) than silicon, allows silicon atoms to lose electrons to it.
(A ketone is an organic compound that contains a carbonyl group, the carbon atom of which is linked to two other carbon atoms belonging to hydrocarbon groups. Diketones contain two such carbonyl groups). Diketones with the carbonyl groups separated by two carbon atoms, for example, can be cyclized to form five-membered aromatic pyrroles, furans, and thiophenes.
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Since I tried Ludwig back in 2017, I have been constantly using it in both editing and translation. Ever since, I suggest it to my translators at ProSciEditing.

Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com