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A Phosphor bronze was deployed as supporting layer because it had better flexibility compared to silicon and could work under high acceleration ambient with good durability.
Here we present a polymer-free method of commercial CVD-grown graphene transfer from the initial copper substrate to the silicon device, in which a 15 nm-thick titanium layer replaces completely the polymer film as supporting layer during the transfer process.
The production of these films is based on a CVD polymer carrying amine groups as supporting layer, which can be deposited independently from the nature of the substrate.
GN layers acted as the supporting layers to stabilize the SiBCN matrix and alleviate the expansion of material structure during charge discharge cycle.
Polymethyl methacrylate (PMMA) was spin-coated on the as-grown graphene/Cu foil as a supporting layer to prevent any cracking during the transfer process.
The synthesized graphene with Cu foil was laminated with the assistance of an adhesive layer, poly ethylene co-vinyl acetate, EVA) with vinyl acetate (VA) as a supporting layer, to plastic film, followed by Cu etching, as shown in Figure 5a [82].
The carbon-based solid liquid lubricating coating was composed of TiC/a-C H solid coaTiC/a-C H solidrting layer and a liquid lubricoatingfilm of Mass (multialkylated cyclopentanesupportingr layer.
As-grown SWCNTs were transferred onto patterned graphene/SiO2/Si substrate by using PMMA [Poly (methyl methacrylate)] as a supporting layer, similar to the graphene transfer method.
The SiO2 layer in the SOI wafer promotes accurate control of the silicon thickness that is used as a supporting layer in the cantilever beam structure.
The novel micromachining process builds a concave diaphragm with designed stiffness, curvature, and diameter as the supporting layer of the device.
The AlN layer can be used as a supporting layer for the deposition of hard materials like CrN on aluminium alloys.
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