Smaller holes are not necessary for the current study since, anyway, they could not be filled by the PDMS. Figure 1 SEM image of the hole array pattern in master mold (hole depth approximately 1,000 nm).
Among them, extraordinary optical transmission (EOT) device consisting of periodic nanohole array patterned in noble metal film has been an active research area both theoretically [8 14] and experimentally [15 18] since 1998 when EOT phenomenon was first observed [19].
To verify the optimal beam adjustment, under the same exposure condition with and without a defocus of 37 μm, we exposed PMMA at a dose range appropriate for PMMA and carried out a standard liftoff process of 10-nm Cr. Figure 4 shows the resulting wheel array pattern in Cr.
The nanodots array pattern in the e-beam resist was transferred to Au layer by RIE with argon ions.
Fig. 2 Maps of the integrated absorption efficiency in the active layer (η I) versus the filling and the height of the arrayed patterns in Device A (a) and Device B (b) when p A (or p B) = 350 nm.
It is defined that, at the cross-sectional view, PMEs have a protruded metal region with a width of D A (or D B) and a height h A (or h B) in Device A (or Device B). p A (or p B) is the periodicity of the arrayed pattern in Device A (or Device B), and the filling ratio f A (f B) of the protruded metal at the cross-sectional planes is defined as D A/p A (or D B/p B).
Since the report of extraordinary optical transmission (EOT) in subwavelength hole arrays, nanohole arrays patterned in metals have become one of the most extensively studied plasmonic structures for fundamental optical physics as well as applications in spectroscopy, biosensing, and color filtering.
In addition to cell arrays patterned in the wells of premade microtiter plates, target microbial cells can be patterned on a solid surface, to maximize the number of cell spots per unit area while enabling the activity of each spot to be distinguished from that of its neighbors, without cross-contamination.
The antenna array patterns are described in, and the subset denotes the th path in cluster.
