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It is observed that α-Si mask plays a significant role in reducing line edge roughness and contributes to successful realization of smooth sidewalls without using any extra process treatment step.
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She really went through an extra process.
This will significantly avoid the use of an extra process and further enhance the process window.
Additionally, an extra process to ensure robustness is (c) robust cumulative motion parameters.
As shown in Fig. 6f, no top α-Si remaining can be observed, which significantly avoids the use of an extra process, demonstrating an enhanced process window.
Especially, the remaining α-Si material after etch previously can be completely removed during silicon patterning without requirement of an extra process and no significant pattern damage.
Higher aspect ratio silicon arrays can be easily achieved by increasing thickness of SiO2 film without the requirement of adding an extra process.
We went to get our plane tickets and check our luggage, my friend and I going through an extra process in order to sit next to each other.
Reducing agents eliminate the need for an extra process step for detoxification.
This protocol allows for successful post-treatment-free synthesis of biomass-based hierarchical porous carbon with specific surface area as high as 1801 m2/g without any extra activation process.
"I think [the extra process] was to buy time.
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CEO of Professional Science Editing for Scientists @ prosciediting.com