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Exact(7)
Under the above design, we consider the loss angle of mirror (a) – (e).
Accordingly, the loss angle of mirror (c)–(e) for the test electron is 30°.
Next, we ask for the loss angle of mirror (a)–(e) for D+ ions (mass m i = 3680 m e ).
Accordingly, the loss angle of mirror (a)–(e) for the test ion is regarded to be about 15°.
If mirror (c) – (e) can reflect 79.9% of electrons with |θ| c between 30°~15°, then, the loss angle of mirror (c) – (e) becomes 19°.
Now, we decrease the loss angle of mirror (c)–(e) for the test electron from 30° to 15° by using an electric field –( widehat{z} ) 400 cos ω c t between planes (c) and (d).
Similar(53)
One can choose the spectrum range of X-ray easily according to the exposure requirement by adjusting the grazing angle of mirrors and the thickness of filters.
The angle of mirrors 1 and 2 are adjusted so that two parallel strips of pulse spectrum are focused at the back focal plane of the objective and they interfere at the front focal plane of the objective resulting in fringe pattern.
A synchronous ramp signal generated by the timing module was used to control the galvanometer mirror by incrementing the angle of the mirror after every pass of the resonant mirror.
Due to tilt angle differences of mirror facets on the image mapper, blank regions are created between adjacent image strips at the detector plane.
Using the hybrid approach the freeform illumination sources required by SMO can be designed by merely adjusting the tilt angles of mirrors without changing other parameters of optical elements, which is most effective for both lithography tool manufacture and its applications.
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