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Direct adsorption of residual H2 gas from the analysis chamber is addressed above.
The vacuum analysis chamber pressure was P ~ 3 × 10-8 torr.
In the analysis chamber, pressures of 1~2 × 10−7 Pa were routinely maintained.
The pressure in the analysis chamber was around 5 × 10−8 Pa.
Vacuum in analysis chamber was kept below 3 × 10−6 Pa during measurement.
In the analysis, chamber pressures of 1 ~ 2 × 10-7 Pa were routinely maintained.
The analysis chamber pressure is less than 5 × 10−9 Torr.
The base pressure in the analysis chamber was about 3 × 10−10 mbar.
The working pressure in the analysis chamber was typically 5 × 10−9 torr.
The residual pressure inside the analysis chamber was kept at values below 2 × 10−8 mbar.
The base pressure of the analysis chamber was in the low 10 10 mbar range.
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