Exact(1)
For straining mechanism, we employed the "self-actuation" technique that exploits the very large residual stress and thus obviates the need for any external means for actuation such as piezo drive, thermal actuator etc. Residual stress, which develops in the silicon nitride film during deposition, is generally considered as an unavoidable problematic feature in the deposition process.
Similar(59)
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Not a simple task, but for Twitter an unavoidable one.
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