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At seven positions in the HEAT alignment and nine positions in the ARM alignment (marked by asterisks in Fig. 2) we found the frequency of hydrophilic residues (D,E,H,K,N,Q,R) to be less than 4%; on average only 1.6% in HEAT and 1.3% in ARM.
Also we showed other alanine substitutions in the alignment (marked with stars).
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Candidates involving alignments marked as multi-mapping can be removed at the filtering stage, if desired (see below).
The key to the successful implementation of the technique is the appropriate alignment mark design, which can solve the problems of aligning photomasks to the random location, orientation and irregular shape exfoliated two-dimensional sheets on the substrates.
Moreover, three dimensions (3D) of alignment mark should be optimized to get higher WQs for self-aligned double patterning (SADP).
Both wafer alignment mark and mask alignment mark consists of linear grating arrays and "+" bar.
We investigated a new design for alignment marks in order to improve the overlay capability.
Gold alignment marks were used to select some SLEG position by OM.
The models and structures of all the designed alignment marks will make it easier for engineers to choose the property alignment mark faced with single patterning or SADP process.
Then we conduct the experiments using a nanometer actuator to drive the wafer alignment mark meanwhile keeping the mask alignment mark motionless, which validates the feasibility and rationality of our designed scheme.
The contrast of moiré fringe varies with the gap between mask (alignment mark) and wafer (alignment mark), which will affect the phase comparison, and induce more errors as well.
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Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com