In the case of non-periodic actuation, the plate-fluid system amplifies those frequencies that are closest to Ωres, which, in turn, dominate the acoustic signature.
Finally, numerical simulation is carried out, and simulation results indicate that the proposed control strategy provides better performance and control effect to plate actuation and control than velocity feedback control, and suppresses vibration effectively.
For simpler calculation, it can be assumed that the rotational movement of the capacitor section is a parallel plate actuation [13].
The dependence of the REWOD energy generation on the wetting dewetting frequency and the number of droplets was investigated using sliding-plates actuation as shown in Figure 1b.
The microactuator utilizes parallel-plates actuation and comb-finger position sensing.
(e) Energy generated per unit area per one oscillation cycle for the case of sliding plates actuation (3.4 nF cm−2 capacitance, 50 Hg droplets, about 0.28 mm2 liquid-substrate overlap area per droplet) as a function of the oscillation frequency.
The sliding plates actuation was achieved by forming circular periodic ring arrays of liquid droplets protruding from a set of small holes in a planar substrate (three rings with the radii of 27, 32 and 37 mm, total of 50 droplets in each ring) and placing a quartz wafer with the patterned electrodes covered by the thin-film dielectric stack on top of the droplets, as shown in Figure 6.
The electro-static actuator based on the parallel-plate capacitive actuation is separated with the FP cavity, and it can be designed without the limits to fabricate the FP cavity.
In particular, an EJS-based tool designed to teach and analyze the snapping problem appearing in MEMS parallel-plate electrostatic actuation is presented.
The scanner construction is based on parallel-plate electrostatic actuation scheme where suspended silicon platform with integrated microlens (movable electrode) is attracted to silicon cover (fixed electrode).
A selection of the literature includes models to account for the effects of structural boundaries [47, 48]; polycrystalline grain structure [49, 50]; layered composite architecture [51 53]; electrostatic actuation [54]; and geometry (plates [54, 55], slotted, channeled, and hollow beams [56 58], double-paddle oscillators [63], and bulk-mode, ring-mode, and disc-mode resonators [59]).
