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Actuation and detection are both electrostatic.
This work represents the first step toward a full integration of pillars with on-chip electronic actuation and detection.
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In view of ultimately enhancing the motional to feedthrough current ratio, a new detection technique that combines second harmonic capacitive actuation and piezoresistive detection is presented herein.
To evaluate the efficacy of the poly-C encapsulation process, poly-C cantilever beam resonators were tested using a piezoelectric actuation and laser detection method before and after the poly-C packaging process.
Light emission, actuation, and sensing are combined in a stretchable electronic material suitable for soft robotics.
These materials are attractive for remote actuation and sensing applications.
Cilllia - 3D Printed Hair Structures for Surface Texture, Actuation and Sensing from Tangible Media Group on Vimeo.
In case of haltere, we obtain a large bandwidth (difference in actuation and sensing frequency).
So far, the examples reported in literature are based on a bulk piezoelectric actuation and optical lever detection, which are not suitable for further integration.
The proposed system utilizes a PMN-PT single crystal for actuation and laser vibrometer for vibration detection.
We will describe the calibration procedure of sensitivity of cantilever piezoresistive deflection detection, thermal actuation and experimental setup of the developed measurement system.
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