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Microrobots 1, 2, 3, and 4 were simultaneously actuated at velocities of 19, 29.6, 44.1, and 31.83 μm/s, respectively, using the actuation block (Fig. 5a c).
A MEMS switch electrostatically actuated at 1.7 V was successfully demonstrated.
The valve used the principle of electrowetting and was able to be actuated at low voltage.
A linear conveyance unit was actuated at desired speeds by a DC brushed servo motor via a ball-bearing screw.
It is shown that the combined system performs extremely well, and is easily actuated at high frequencies with conventional hardware.
Results showed that 5-peaks sinusoidal tone burst actuated at 30 kHz or 120 kHz are preferred input voltage.
Similar(39)
Although previous SIDM actuators are easily miniaturized and enable accurate positioning, these actuators cannot actuate at high speed and cannot provide powerful driving because they are driven at an off-resonant frequency using a soft-type PZT.
That means it is able to actuate at 0.5 Hz to 45 bend angles with Move-it.
Here we present an ultra-low voltage mechanical switch actuating at 1.7 V by introducing a folded hinge structure, effectively suppressing the deflection in the compliant hinges.
By actuating at resonance, we can also have a design with a higher spring stiffness design such that the micro-spectrometer will have little influence from external perturbation.
Devices are reported to actuate at a voltage as low as 8.5 V only, with a capacitance ratio as high as Cr = 7 are added advantages exhibited by the device.
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