The reflectivity measurements were carried out with a PerkinElmer Lambda 950 UV/VIS spectrophotometer with a variable angle accessory, Universal Reflectance Accessory (URA; Waltham, MA, USA), for 8° and 68°.
To measure these data, we used FTIR spectrometer Bruker IFS 66 with accessory with grazing angle of the incidence equipped by Ge hemisphere as ATR element.
Bi-conical reflectance measurements were taken in vacuum with an A513 accessory unit, setting incidence angle to the minimum possible (i = 13°) and varying the emission angle between 13° and 80°.
The optical reflectivity measurements were performed using a PerkinElmer (Perkin Elmer Italia SpA, Monza (MI), Italy) Lambda 950 spectrometer equipped with the Universal Reflectance Accessory using an incidence angle of 8°. Figure 2 Cross-section SEM image of a PSi sample for thickness measurement.
A Harrick Seagull™ variable-angle reflection accessory allows measurement of the bi-conical reflectance at room temperature, under purging conditions in the extended spectral range from 0.4 to 55 µm, for i and e from 5° to 85°.
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To obtain angle-dependent reflectance, a Cary variable angle specular reflectance accessory in specular mode was utilized.
The spectrometer is equipped with a multireflection variable angle horizontal ATR accessory.
A fourth seta (seta 1 according to Sweatman [ 7]; seta ae according to Fain [ 18]) was shorter than the three setae mentioned above, and arose latero-apically at a small accessory lobe forming a small angle with relation to the main lobe.
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This chapter presents the design and performance of a unique variable angle reflectance and transmittance accessory developed within our laboratory.
