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spherical aberration coefficient.
We obtained values of 2.9 mm for the chromatic aberration coefficient and 14 mm for the spherical aberration coefficient, at a working distance of 2 mm.
"Cs" and "vol" are the objective lens spherical aberration coefficient in mm and accelerating voltage of the electron microscope.
Together with each radius, the five-order astigmatism aberration coefficient (A4) with the largest contribution at this radius is given on the right.
where k is the scattering vector, λ is the wavelength of electron beam, Cs is the spherical aberration coefficient of a microscope, and ∆z is the defocus value.
Simulations for 100 kV, spherical aberration coefficient − 0.037 mm, probe semiangle 31 mrad, and BF and ABF collection angles 0 1 and 8 20 mrad, respectively.
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The numerical aberration coefficients are given in the "Appendix".
Figure 1 Zemlin tableau for measurement of aberration coefficients.
Figure 2 shows the phase plate used to visualize the corrected aberration coefficients.
Figure 2 Phase plate calculated from the aberration coefficients of the last measured probe tableau.
All the aberration coefficients agree well, with maximum relative deviation less than 0.015%.
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