Exact(5)
The 8×8 array consists of a grid of 64 suspended pixels fabricated on a silicon on insulator (SOI) wafer.
This paper reports on a membrane-type acoustic transducer fabricated by bonding a piezoelectric ceramic Pb(Zr,Ti O3 (PZT) plate to a silicon on insulator (SOI) wafer.
The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer.
This paper reports for the first time on the performance and long-term stability of a silicon on insulator (SOI) thermodiode with tungsten metallization, suspended on a dielectric membrane, at temperatures beyond 300 °C.
The microlens scanner was fabricated by lens-profile-transferring to the structural layer of a silicon on insulator (SOI) wafer by the reactive ion etching (RIE) from thermally reflowed photo resist (PR) and continuing two deep RIEs.
Similar(55)
The PADOX method is known to convert a small one-dimensional Si wire formed on a silicon-on-insulator (SOI) substrate into a SET automatically.
The crossing is formed by only one step etching with the grating couplers on a silicon-on-insulator (SOI) platform.
The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon.
The array consists of 88-microvalves fabricated on a silicon-on-insulator (SOI) substrate.
The substrate is a silicon-on-insulator (SOI) wafer with an oxide thickness of 500 nm.
We present a Silicon-On-Insulator (SOI) ring resonator based on refractive index sensor.
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