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The phrase "a debate of semantics" is correct and usable in written English.
It can be used when discussing a disagreement or discussion that revolves around the meanings of words or phrases rather than the actual issues at hand.
Example: "The meeting turned into a debate of semantics, with team members arguing over the definition of key terms instead of addressing the main problem."
Alternatives: "a discussion of terminology" or "a dispute over meanings".
Exact(1)
QUESTION FROM PAT: I am starting to get the impression that is going to be a debate of semantics over substance.
Similar(59)
Beyond that, it's just an argument of semantics.
There is a debate over the semantics, and over who is to blame for the spectacle of books being taken out of the students hands.
A matter of semantics?
It is a question of semantics.
It's all a matter of semantics.
But that is a case of semantics.
This is not merely a matter of semantics.
This is more than a matter of semantics.
It's become almost a matter of semantics.
The show's description, however, has a problem of semantics.
More suggestions(1)
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Since I tried Ludwig back in 2017, I have been constantly using it in both editing and translation. Ever since, I suggest it to my translators at ProSciEditing.

Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com