The surface metrology system is based on a stitching interferometer that can determine stitching angles between adjacent local surface profiles.
We developed a nanofocusing mirror that has approximately the same surface curvature as a sub-10-nm focusing mirror, to examine the measurement accuracy of the developed surface metrology system.
The technology has matured to the point that an optical metrology system for sound restoration has been designed and built for the Library of Congress.
Before the assembly procedure, a reference coordinate system will be defined with three fiducial targets on the wall of the test hall by a sophisticated optical metrology system (SOMS).
The sizes of sc-Si surface microstructure were measured on a Zeta 3D metrology system.
Therefore a novel scanner based inline metrology system has been developed to control the laser surface structuring process by a process monitoring software.
The vast range of applications of 3-D surface metrology rely on the development of suitably advanced instruments—namely, stylus instruments, optical instruments (including focus detection and interferometry), and scanning probe microscopes (including scanning tunneling microscopy (STM), and atomic force microscopy (AFM)).
In practice, there are challenges to rotate the test surface accurately to the desired positions, especially for large optics, and keep the environment and metrology system stable during the multi-measurements [12].
Moreover, there are challenges to rotate the test surface accurately to the desired positions, especially for large optics, and keep the environment and metrology system stable during the multi-measurements.
In particular it describes the design and testing of the air-bearing motion system with parallel stage configuration, and the separate metrology system with Silicon Carbide metrology frame and an interferometry system for direct displacement measurement of the optical probe.
The designed and implemented control system permits high-accuracy trajectory tracking control even for small velocities such as typical measurement velocities in surface metrology.
